Independent Module Parts & Components

Our process tools use many sub modules, for example, 1) UHV Vacuum chambers, 2) UHV viewports with shutters, 3) chamber doors, 4) RF feedthroughs, 5) corrosive gas delivery modules, 6) PECVD shower electrodes, 7) substrate heaters, and Power supply switches, etc. We are introducing, first time, some of above sub modules to our old and new customers.

  • UHV Vacuum chambers (CF 6”, CF10” & CF 12”)
  • UHV viewports with shutters (CF 2.75”, 3-3/8”, 4.5”, 6”)
  • Chamber doors (CF6, CF8, CF10)
  • RF feedthroughs on CF1.33” and CF 2.75” flanges
  • Corrosive gas management modules for 3 to 7 gases
  • CF flange mounted PECVD shower electrodes for 2”, 4”, 8” size substrates
  • CF flange mounted high temperature vacuum and corrosive gas compatible heaters for 2”, 4”, 8” size substrates
  • CF flange mounted 900°C Quartz lamp heaters for 4”, 8”, 10” size substrates.
  • DC filtered and multiple DC/RF switches


Independent Module Parts & Components

UHV Vacuum chambers

Part# Description Inside width Inside depth Inside height Ports Price, EXW Quote
UHVVC-0606-6 UHV six inch cube chamber with CF6 flanges, manufactured from 304 stainless steel plates, leak tested down to 5 x 10-10 Torr.l/s, accepts our standard process sub modules, can be used in surface studies, medical studies, thin film deposition, tribology, space simulation, etc., © 5.3" 5.3" 5.3" 6 $4,200.00
UHVVC-1010-6 UHV 10 inch cube chamber with CF10 flanges, manufactured from 304 stainless steel plates, leak tested down to 5 x 10-10 Torr.l/s, accepts our standard process sub modules, can be used in surface studies, medical studies, thin film deposition, tribology, space simulation, etc., © 9.7" 9.7" 9.7" 6 $8,200.00
UHVVC-1212-6 UHV 12 inch cube chamber with CF12 flanges, manufactured from 304 stainless steel plates, leak tested down to 5 x 10-10 Torr.l/s, accepts our standard process sub modules, can be used in surface studies, medical studies, thin film deposition, tribology, space simulation, etc., © 11.3" 11.3" 11.3" 6 $32,600.00

UHV viewports with manual shutters

Part# Description View area Flange Price, EXW Quote
UHVVS-2 UHV 2.75" inch manual viewport with shutter, CF2.75" flange, manufactured from 304 stainless steel, leak tested down to 5 x 10-10 Torr.l/s. © 1.1" dia CF2.75 $220.00
UHVVS-4 UHV 4.5" inch manual viewport with shutter, CF4.5" flange, manufactured from 304 stainless steel, leak tested down to 5 x 10-10 Torr.l/s. © 2.1" dia CF4.5 $350.00
UHVVS-6 UHV 6.0" inch manual viewport with shutter, CF6" flange, manufactured from 304 stainless steel, leak tested down to 5 x 10-10 Torr.l/s. © 3.1" dia CF6 $440.00

Load/Unload Chamber Doors with Sensor

Part# Description View area Flange Price, EXW Quote
UHVLD-6 Load/unload 6" door with a viewport (200°C) on a CF6" flange, manufactured from 304 stainless steel, sensor for open/close position, leak tested down to 5 x 10-10 Torr.l/s. © 3.1" dia CF2.75 $550.00
UHVLD-8 Load/unload 8" door with a viewport (200°C) on a CF8" flange, manufactured from 304 stainless steel, sensor for open/close position, leak tested down to 5 x 10-10 Torr.l/s. © 3.1" dia CF2.75 $750.00
UHVLD-10 Load/unload 10" door with a viewport (200°C) on a CF10" flange, manufactured from 304 stainless steel, sensor for open/close position, leak tested down to 5 x 10-10 Torr.l/s. © 3.1" dia CF2.75 $825.00

RF Power feedthrough

Part# Description Flange Price, EXW Quote
UHVRF-1 The ceramic sealed power RF feed through is electrically rated for operation with one side in dry atmospheric conditions (N female connector) while the opposite end is in a vacuum environment (7/16 DIN male connector) and is used to transmit high voltage, high current or a combination of both. It is mounted on a standard CF1.33 flange, atmospheric side has a connector and vacuum side has a connector, leak tested down to 5 x 10-10 Torr.l/s. © CF1.33 $1,240.00
UHVRF-2 The ceramic sealed power RF feed through is electrically rated for operation with one side in dry atmospheric conditions (N female connector) while the opposite end is in a vacuum environment (7/16 DIN male connector) and is used to transmit high voltage, high current or a combination of both. It is mounted on a standard CF2.75 flange, atmospheric side has a connector and vacuum side has a connector, leak tested down to 5 x 10-10 Torr.l/s. © CF2.75 $1,430.00

Corrosive gas delivery management modules

Part# Description Price, EXW Quote
GDM-3 3-gas manifold delivery management module features all stainless steel construction, electronic mass flow controllers (four different vendors) and electro-pneumatic valving. An inert gas purge is provided through a separate line. Provisions to connect to house gas supply are included. All gas delivery manifolds are installed in a vented NEMA gas enclosure with an outlet to be connected to house exhaust system. All MFCs can either be run from a computer or a controller. All gas delivery tubes uses stainless steel 316L-electro-polished with VCR fittings. All process gases can be controlled by a safety interlock system. All gas lines are leak tested down to 5 x 10-10 Torr.l/s. © $12,400.00
GDM-5 5-gas manifold delivery management module features all stainless steel construction, electronic mass flow controllers (four different vendors) and electro-pneumatic valving. An inert gas purge is provided through a separate line. Provisions to connect to house gas supply are included. All gas delivery manifolds are installed in a vented NEMA gas enclosure with an outlet to be connected to house exhaust system. All MFCs can either be run from a computer or a controller. All gas delivery tubes uses stainless steel 316L-electro-polished with VCR fittings. All process gases can be controlled by a safety interlock system. All gas lines are leak tested down to 5 x 10-10 Torr.l/s. © $22,500.00
GDM-7 7-gas manifold delivery management module features all stainless steel construction, electronic mass flow controllers (four different vendors) and electro-pneumatic valving. An inert gas purge is provided through a separate line. Provisions to connect to house gas supply are included. All gas delivery manifolds are installed in a vented NEMA gas enclosure with an outlet to be connected to house exhaust system. All MFCs can either be run from a computer or a controller. All gas delivery tubes uses stainless steel 316L-electro-polished with VCR fittings. All process gases can be controlled by a safety interlock system. All gas lines are leak tested down to 5 x 10-10 Torr.l/s. © $32,600.00

PECVD shower electrode modules

Part# Description Price, EXW Quote
ELM-2 Designed for processing substrates up to 50 mm x 50 mm in area, self contained stand-alone PECVD electrode module mounted on a CF 6” flange, can be added to any PECVD chamber. All stainless steel construction with UHV capability. It includes a uniform gas shower flow, RF feed through, gas delivery input and can be mounted either for upward or downward deposition. Cocentrated plasma zone produces films with uniformity of ±2%. Option to continuously adjust distance between electrode and substrate, 2.5 mm to 25 mm, is available. $22,400.00
ELM-4 Designed for processing substrates up to 100 mm x 100 mm in area, self contained stand-alone PECVD electrode module mounted on a CF 10” flange, can be added to any PECVD chamber. All stainless steel construction with UHV capability. It includes a uniform gas shower flow, RF feed through, gas delivery input and can be mounted either for upward or downward deposition. Cocentrated plasma zone produces films with uniformity of ±2%. Option to continuously adjust distance between electrode and substrate, 2.5 mm to 25 mm, is available. $32,400.00
ELM-8 Designed for processing substrates up to 200 mm x 200 mm in area, self contained stand-alone PECVD electrode module mounted on a CF 12” flange, can be added to any PECVD chamber. All stainless steel construction with UHV capability. It includes a uniform gas shower flow, RF feed through, gas delivery input and can be mounted either for upward or downward deposition. Cocentrated plasma zone produces films with uniformity of ±2%. Option to continuously adjust distance between electrode and substrate, 2.5 mm to 25 mm, is available. $42,400.00

Vacuum and corrosive gas compatible heater modules

Part# Description Price, EXW Quote
UHVH-350-2 Designed for heating substrates up to 50 mm in diameter, self contained stand-alone heater module mounted on a CF 6” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes heating element, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 350˚C ± 1˚C. The heater has built-in thermal insulation material to help with minimum heating of chamber walls. $12,400.00
UHVH-600-2 Designed for heating substrates up to 50 mm in diameter, self contained stand-alone heater module mounted on a CF 6” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes heating element, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 600˚C ± 1˚C. The heater has built-in thermal insulation material to help with minimum heating of chamber walls. $22,400.00
UHVH-350-4 Designed for heating substrates up to 100 mm in diameter, self contained stand-alone heater module mounted on a CF 6” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes heating element, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 350˚C ± 1˚C. The heater has built-in thermal insulation material to help with minimum heating of chamber walls. $18,400.00
UHVH-600-4 Designed for heating substrates up to 100 mm in diameter, self contained stand-alone heater module mounted on a CF 6” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes heating element, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 600˚C ± 1˚C. The heater has built-in thermal insulation material to help with minimum heating of chamber walls. $25,400.00
UHVH-350-8 Designed for heating substrates up to 200 mm in diameter, self contained stand-alone heater module mounted on a CF 6” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes heating element, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 350˚C ± 1˚C. The heater has built-in thermal insulation material to help with minimum heating of chamber walls. $18,400.00
UHVH-600-8 Designed for heating substrates up to 200 mm in diameter, self contained stand-alone heater module mounted on a CF 6” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes heating element, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 600˚C ± 1˚C. The heater has built-in thermal insulation material to help with minimum heating of chamber walls. $25,400.00
UHVQH-900-8 Designed for heating substrates up to 200 mm in diameter, self contained stand-alone heater module mounted on a CF 12” flange, can be added to any vacuum chamber. All stainless steel construction with UHV capability. It includes quartz heating lamps, power supply, PID temperature controller, two thermocouples can be mounted either for upward or downward heating. The maximum temperature of substrate will be 900˚C ± 3˚C. The heater has built-in thermal insulation shields to help with minimum heating of chamber walls. $45,400.00

DC filtered and multiple DC/RF switches

Part# Description Price, EXW Quote
DCS-1-3 DC power switch allows use of single DC power supply, up to 5000 watts, to be connected to max three magnetron sputtering cathodes one at a time. It uses vacuum relays and come with a built in 24 V DC power supply. Manual or remote switching. Input power 110V/220V, single phase. Standard connectors female HN or UHF. Size: 254 mm x 203 mm x 152 mm, weight: 2.5 kg. $1,900.00
RFS-1-3 RF power switch allows use of single RF power supply, up to 5000 watts, to be connected to max three magnetron sputtering cathodes one at a time. It uses vacuum relays and come with a built in 24 V DC power supply. Manual or remote switching. Input power 110V/220V, single phase. Standard connectors female HN or UHF. Size: 254 mm x 203 mm x 152 mm, weight: 2.5 kg. $1,900.00
RFDCS-1-3 DC power switch blocks RF power and allows use of single DC power supply, up to 5000 watts, to be connected to max three magnetron sputtering cathodes one at a time. It uses vacuum relays and come with a built in 24 V DC power supply. Manual or remote switching. Input power 110V/220V, single phase. Standard connectors female HN or UHF. Size: 254 mm x 203 mm x 152 mm, weight: 2.5 kg. $2,900.00