Independent Module Parts & Components
Our process tools use many sub modules, for example, 1) UHV Vacuum chambers, 2) UHV viewports with shutters, 3) chamber doors, 4) RF feedthroughs, 5) corrosive gas delivery modules, 6) PECVD shower electrodes, 7) substrate heaters, and Power supply switches, etc. We are introducing, first time, some of above sub modules to our old and new customers.
- UHV Vacuum chambers (CF 6”, CF10” & CF 12”)
- UHV viewports with shutters (CF 2.75”, 3-3/8”, 4.5”, 6”)
- Chamber doors (CF6, CF8, CF10)
- RF feedthroughs on CF1.33” and CF 2.75” flanges
- Corrosive gas management modules for 3 to 7 gases
- CF flange mounted PECVD shower electrodes for 2”, 4”, 8” size substrates
- CF flange mounted high temperature vacuum and corrosive gas compatible heaters for 2”, 4”, 8” size substrates
- CF flange mounted 900°C Quartz lamp heaters for 4”, 8”, 10” size substrates.
- DC filtered and multiple DC/RF switches