Magnetron Sputtering Cathodes & Targets

Since 2001, ProtoFlex has developed, manufactured and used magnetron sputtering cathodes of various sizes in our process tools. We are introducing first time, very selective standard cathode sizes for our old and new customers. Protoflex has also worked with many target vendors around the world to supply materials with process recipes producing state-of-the-art thin films. We are also offering limited number of materials for this films processing. Cathodes and target sizes include: round: 2”, 3”, 4”, 6”; rectangular internal vertical: 5.5” x 14”; rectangular internal: 3” x 8”, 5.5” x 14”; and rectangular external: 3” x 8”, 5.5” x 14”, 8” x 54”.
Standard features include:

  • Stainless steel 304/316 construction
  • 40% utilization
  • HV & UHV options
  • DC/RF /Pulsed DC compatible
  • Water protected magnets
  • Water flow up to 5 gpm
  • Multiple cathodes on a single mounting plate option
  • Standard backing plate
  • Various options for mounting targets with and without backing plate

Magnetron Sputtering Cathodes & Targets

Magnetron Sputtering Cathodes

module# Type Process Dimensions (") Price Quote
DC Plused DC RF Round Rectangular EXW Add
MCROI-2.0-00 Internal 2 $2,200.00
MCROI-3.0-00 Internal 3 $2,860.00
MCROI-4.0-00 Internal 4 $3,718.00
MCROI-6.0-00 Internal 6 $4,833.00
MCREV-5.5-14 Vertical 5.5" x 14" $8,216.00
MCREI-3.0-08 Internal 3" x 8" $5,913.00
MCREI-5.5-14 Internal 5.5" x 14" $8,869.00
MCREE-3.0-08 External 3" x 8" $6,913.00
MCREE-5.5-14 External 5.5" x 14" $10,369.00
MCREE-8.0-54 External 8.0" x 54" $22,812.00