Universal R&D

PECVD/HWCVD

Sputtering/Evaporation

Research & Development Process Tools

Our small foot print R&D tools are UHV in construction incorporating any of PECVD, HWCVD, magnetron sputtering and thermal evaporation sources and includes substrate processing sizes from 50 mm to 200 mm in diameter. ProtoFlex, unlike its competitors, proudly validates our systems by providing process recipes producing state-of-the-art thin films.

  • Stainless steel 304/316 construction, CF flanges
  • Stand alone, single process zone
  • Base pressures < 1 x 10-8 Torr capability
  • Fixed inter-electrode distance
  • Full range gauges
  • Two viewports
  • Turbo pump and mechanical pump package

Options include robotic load/unload module, 900ºC temperature capability, up to seven gases module, external capability to change inter-electrode distance in-situ, up to six viewports, substrate dc bias capability, multiple power supplies, etc.

Universal Process Tool- TorrFLEX

Universal Process Tool- TorrFLEX
UHV, up to four substrates of 5 cm x 5 cm, rotation, 2 gases


module# Sources PECVD Sputt HWCVD Thermal Evap EBeam Starting at Quote
1 2 3 4 EXW Add
TorrFLEX0001-1-P-00 $95,000.00
TorrFLEX0001-2-P-00 $135,000.00
TorrFLEX0001-1-H-00 $95,000.00
TorrFLEX0001-1-H-00 $135,000.00
TorrFLEX0001-1-S-00 $95,000.00
TorrFLEX0001-1-S-00 $125,000.00
TorrFLEX0001-1-S-00 $145,000.00
TorrFLEX0001-1-S-00 $165,000.00
TorrFLEX0001-3-TE-00 $65,000.00
TorrFLEX0001-2-EE-00 $165,000.00
FFLEX1000-0-0-LL Addition of a load lock to any process module $30,000.00
Option: Multi-process capability, 800°C, in-situ cleaning, up to 6 gases, bias, ion source, roll to roll web coater

Research & Development Process Tools

FLEX1100- PECVD Tool

module# Substrate Deposition Temp Starting at Quote
50 mm 100 mm 200 mm downward upward 300°C 600°C EXW Add
FLEX1102-1-1-00 $175,000.00
FLEX1102-2-1-00 $175,000.00
FLEX1102-2-1-00 $195,000.00
FLEX1102-2-1-00 $195,000.00
FLEX1104-1-1-00 $220,000.00
FLEX1104-2-1-00 $220,000.00
FLEX1104-1-2-00 $245,000.00
FLEX1104-2-2-00 $245,000.00
FLEX1108-1-1-00 $250,000.00
FLEX1108-2-1-00 $250,000.00
FLEX1108-1-2-00 $285,000.00
FLEX1108-2-2-00 $285,000.00
FLEX1200- HWCVD Tool
FLEX1208-2-1-00 $230,000.00
FLEX1208-2-2-00 $265,000.00
FLEX1000-0-0-LL Addition of a load lock to any process module $30,000.00

FLEX1300- Magnetron Sputtering Tool

module# Substrate Deposition Temp Guns Rotation Starting at Quote
50 mm 100 mm 200 mm downward upward 300°C 600°C 3 EXW Add
FLEX1302-1-1-3-20-00 $220,000.00
FLEX1302-2-1-3-20-00 $220,000.00
FLEX1302-1-2-3-20-00 $260,000.00
FLEX1302-2-2-3-20-00 $260,000.00
FLEX1304-1-1-3-20-00 $250,000.00
FLEX1304-2-1-3-20-00 $250,000.00
FLEX1304-1-2-3-20-00 $300,000.00
FLEX1304-2-2-3-20-00 $300,000.00
FLEX1308-1-1-3-20-00 $280,000.00
FLEX1308-2-1-3-20-00 $280,000.00
FLEX1308-1-2-3-20-00 $360,000.00
FLEX1308-2-2-3-20-00 $360,000.00
FLEX1400- Thermal Evaporation Tool
FLEX1308-1-1-3-20-00 $220,000.00
FLEX1308-1-2-3-20-00 $320,000.00
FLEX1000-0-0-LL Addition of a load lock to any process module $30,000.00