Technology Solutions

Since 2001, ProtoFlex Corporation focus is on supplying deposition tools incorporating PECVD, HWCVD, magnetron sputtering, evaporation from basic small foot print R&D systems (FLEX1000, FLEX2000, FLEX6000) to rapid prototype cluster & inline systems (FLEX3000, FLEX5000) to a variety of customers with process recipes producing state-of-the-art thin films.
Staff at Protoflex Corporation have developed and manufactured many sub modules since 1985 and are being used in our and other manufacturers process tools. We are introducing first time some of these independent modules, components and deposition sources. List includes: Magnetron sputtering sources (Round: 2”, 3”, 4”, 6”; Rectangular Internal vertical: 5.5” x 14”; Rectangular internal: 3” x 8”, 5.5” x 14”; Rectangular external: 3” x 8”, 5.5” x 14” x 8” x 54”), b) magnetron sputtering targets, c) UHV Vacuum chambers (CF 6”, CF10” & CF 12”), d) UHV viewports with shutters (CF 2.75”, 3-3/8”, 4.5”, 6”), e) chamber doors (CF6, CF8, CF10), f) RF feedthroughs on CF1.33” and CF 2.75” flange, g) corrosive gas management modules for 3 to 7 gases, h) CF flange mounted PECVD shower electrodes for 2”, 4”, 8” size substrates, i) CF flange mounted high temperature vacuum and corrosive gas compatible heaters for 2”, 4”, 8” size substrates and 900°C Quartz lamp heaters for 4”, 8”, 10” size substrates.