Research & Development Tools
Our small footprint R&D tools are UHV in construction incorporating any of PECVD, HWCVD, magnetron sputtering and thermal evaporation sources and includes substrate processing sizes from 50 mm to 200 mm in diameter. ProtoFlex, unlike its competitors, proudly validates our systems by providing process recipes producing state-of-the-art thin films.

Since 2006, ProtoFlex has developed and sold unique vertical web coaters to developers of emerging thin film products. Our vertical sideways deposition configuration reduces particulate and dust on moving web. Our family of Roll to Roll Web Coaters includes web processing sizes from 200 mm to 500 mm in width and any of PECVD, HWCVD, and magnetron sputtering sources can be incorporated.
Standard Features

  • Stainless steel 304/316 construction, CF flanges except web coaters make use of Viton O rings
  • Stand alone, single process zone
  • Web coaters can have cooled/heated drum process capability
  • Base pressures < 1 x 10-8 Torr capability
  • Fixed inter-electrode distance
  • Full range gauges
  • Two viewports
  • Turbo pump and mechanical pump package

  • Sputtering
  • Thermal Evaporation

  • Flat panel displays
  • Multi-chip modules
  • Photovoltaics
  • Dielectrics
  • Nano Films
  • Optoelectronics
  • Carbon & Diamond Films
  • Flexible Electronics