Cluster Tool, PECVD,Sputtering, Evaporation

    Cluster Tool, PECVD,Sputtering, Evaporation

    Inline Multi Process

Rapid Prototype Pilot Production Tools

ProtoFlex partners with developers of emerging thin film products to bring devices from prototype to pilot production, and beyond. Our rapid prototype systems include Cluster and Inline tools with multi chamber and multi-process capabilities. It can process substrate sizes from 50 mm diameter to 400 mm x 800 mm. Any of PECVD, HWCVD, magnetron sputtering and thermal evaporation sources can be incorporated.
Standard features include:

  • Up to six process modules in a cluster tool configuration and any number of process modules in an inline configuration
  • Cluster tool configuration has a central load lock & Load/Unload module. Inline configuration has a Load/Unload module.
  • Base pressures < 1 x 10-6 Torr capability
  • Fixed inter-electrode distance
  • Ion and Pirani gauges
  • Two viewports per module
  • Turbo pump and mechanical pump package

Options include robotic load/unload module, 700ºC temperature capability, up to seven gases module, external capability to change inter-electrode distance in-situ, up to six viewports, substrate dc bias capability, multiple power supplies, etc.

Rapid Prototype Pilot Production Tools

FLEX3100- Multi Process PECVD Cluster Tool with Central Robot Chamber

module# Substrate Deposition Temp Modules Starting at Quote
100 mm 200 mm downward upward 350°C 3 EXW Add
FLEX3104-1-1-3-00 $482,000.00
FLEX3104-2-1-3-00 $482,000.00
FLEX3104-1-1-3-00 $572,000.00
FLEX3104-2-1-3-00 $572,000.00
FLEX1104-0-0-00 Additional PECVD chamber for 100 mm substrates $175,000.00
FLEX1108-0-0-00 Additional PECVD chamber for 200 mm substrates $190,000.00
FLEX1204-0-0-00 Additional HWCVD chamber for 100 mm substrates $210,000.00
FLEX1208-0-0-00 Additional HWCVD chamber for 200 mm substrates $210,000.00
FLEX1304-0-0-00 Additional magnetron sputtering chamber with 3 cathodes for 100 mm substrates $240,000.00
FLEX1308-0-0-00 Additional magnetron sputtering chamber with 3 cathodes for 200 mm substrates $280,000.00

FLEX5000- In Line Multi Process Tool with Load/Unload module

module# Process Substrate Deposition Temp Modules Starting at Quote
PECVD Sputt,2 targets 30 cm x 30 cm 60 cm x 60 cm downward upward 350°C 2 EXW Add
FLEX51012-1-1-2-LL $614,000.00
FLEX51012-2-1-2-LL $614,000.00
FLEX51024-1-1-2-LL $859,000.00
FLEX51024-2-1-2-LL $859,000.00
FLEX53012-1-1-2-LL $737,000.00
FLEX53012-2-1-2-LL $737,000.00
FLEX53024-1-1-2-LL $884,000.00
FLEX53024-2-1-2-LL $884,000.00
FLEX51012-0-0-0-00 Additional PECVD chamber for 30 cm x 30 cm substrates $220,000.00
FLEX51024-0-0-0-00 Additional PECVD chamber for 60 cm x 60 cm substrates $280,000.00
FLEX52012-0-0-0-00 Additional HWCVD chamber for 30 cm x 30 cm substrates $220,000.00
FLEX52024-0-0-0-00 Additional HWCVD chamber for 60 cm x 60 cm substrates $360,000.00
FLEX53012-0-0-0-00 Additional magnetron sputtering chamber for 30 cm x 30 cm substrates $250,000.00
FLEX53024-0-0-0-00 Additional magnetron sputtering chamber for 60 cm x 60 cm substrates $290,000.00